Abstract: The Ag films,ZnO films and ZnO/Ag/ZnO multilayer films deposited on PET fiber substrates were prepared by magnetron sputtering at room temperature.The surface morphology of the nano-structured films was observed by using atomic force microscopy(AFM).Its electroconductive property was measured and analyzed.Results showed that the density and uniformity of Ag film became better as the thickness of the film increased to 20 nm from 10 nm.The surface morphology of fiber substrate was different from that of ZnO film substrate when they had same thickness growth of Ag film on their surfaces.The uniformity of Ag film deposited ZnO film substrate was better than that of Ag film deposited fiber substrate,and the particle of Ag film of the former was bigger,and more uniform.Also,the surface morphology of fiber substrate was different from that of Ag film substrate when they had same thickness growth of ZnO film on their surfaces.The resistivity of multilayer films was decreased as the thickness of the Ag film was increased.The resistivity of multilayer films reached to the minimum value when the thickness of Ag film was 20 nm.