JOURNAL OF TEXTILE RESEARCH ›› 2006, Vol. 27 ›› Issue (9): 14-17.

• 研究论文 • Previous Articles     Next Articles

AFM analysis and conductivity of nano-structured silver film deposited by magnetron sputtering

HONG Jian-han;WANG Hong-bo;WEI Qu-fu;GAO Wei-dong   

  1. The Key Laboratory of Science & Technology of Eco?-textile;Ministry of Education;Southern Yangtze University;Wuxi;Jiangsu 214122;China
  • Received:2005-10-18 Revised:2006-04-24 Online:2006-09-15 Published:2006-09-15

Abstract: PET spun-bonded nonwoven fabric deposited with nano-structured silver thin film was prepared by magnetron sputtering at room temperature.The effect of technical parameters,such as sputtering power,vacuum pressure,on the morphology and particle diameters of the nano-structured silver thin film was analyzed by AFM(atomic force microscope).The relation between sputtering parameters and the conductivity of the nano-structured silver thin films was also investigated.It showed that the increase in sputtering power resulted in the increase in the dimension of silver particles of the thin film.The best conductivity was achieved at the power of(120 W.) Contrarily, the dimension of silver particle and the conductivity of thin films decreased as argon′s pressure increasing.

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