基于激光诱导石墨烯的柔性温度传感器制备及其性能

doi:10.13475/j.fzxb.20250900501

摘要/Abstract

摘要：

针对传统温度传感器在柔性、可穿戴应用中存在的力学性能不足和制备工艺复杂等问题,采用激光诱导石墨烯(LIG)技术,制备了一种基于聚酰亚胺(PI)基底的新型柔性温度传感器。首先,在碱性环境下对PI薄膜进行氧化改性预处理,这有利于后续更好地形成LIG。在优化激光功率与扫描速度等工艺参数后,成功制备出具有良好导电性能的LIG。结果表明,该LIG温度传感器在25~75 ℃范围内表现出稳定线性响应,电阻温度系数为0.134%/℃,响应与恢复速度快,循环稳定性与长期稳定性良好。此外,该LIG温度传感器可实现对呼吸行为及不同部位皮肤温度的实时监测,展现出优异的应用潜力。本研究结果为基于LIG柔性温度传感器的低成本、大规模制备提供了新思路,具有良好的推广价值。

关键词: 激光诱导石墨烯, 聚酰亚胺, 温度传感器, 健康监测, 传感性能, 导电性, 柔性传感器

Abstract:

Objective This study aims to address the limitations of conventional rigid temperature sensors, such as poor flexibility, complex fabrication, and unsuitability for wearable healthcare monitoring. By utilizing laser-induced graphene (LIG) technology on polyimide (PI) substrates, a new low-cost, scalable, and flexible temperature sensor is developed. The primary goal is to enhance sensing performance, mechanical flexibility, and long-term stability, thereby enabling real-time monitoring of human physiological signals in intelligent healthcare and wearable electronics.

Method PI films were pretreated in an alkaline solution to introduce oxygen-containing functional groups to facilitate the subsequent LIG formation. Using a CO₂ laser under optimized conditions for power and scanning speed, porous LIG patterns were fabricated on both PI and modified PI membranes. The prepared LIG was characterized by SEM, XPS, Raman spectroscopy, and sheet resistance tests. Finally, copper electrodes were attached with a conductive silver paste, and the device was encapsulated in polydimethylsiloxane (PDMS) to yield a flexible LIG-based temperature sensor.

Results Alkaline treatment significantly reduced PI surface roughness from 1.91 nm to 0.269 nm and enhanced hydrophilicity, facilitating more uniform LIG formation. SEM images revealed a porous 3D graphene structure with improved uniformity in modified PI-LIG. XPS and Raman analyses confirmed higher graphitization and reduced oxygen content in modified samples, with I_D/I_G ratio decreasing from 1.83 to 0.83. The optimal LIG exhibited a sheet resistance of 18 Ω/□ at 40% laser power and 550 mm/s scan speed. The sensor demonstrated a linear resistance-temperature relationship from 25-75 ℃, with a temperature coefficient of resistance 0.134%/℃ and excellent linearity (R²=0.997 3). It showed rapid response and recovery times, high repeatability over 10 cycles, and stable performance over 10 d. Applications included real-time monitoring of breathing patterns (slow, normal, and rapid breathing) and skin temperature at various body sites (forehead, wrist, and knee), with accurate and consistent readings matching physiological ranges.

Conclusion This research demonstrates a facile and efficient method to fabricate high-performance flexible temperature sensors using LIG technology on alkali-modified PI substrates. The developed device combines excellent linear sensitivity, fast response, repeatability, and long-term stability with low-cost, scalable manufacturing. Its proven ability to monitor both body temperature and respiratory behaviors indicates strong potential for integration into wearable electronics, smart healthcare systems, and personalized medical monitoring. In future work, sensor miniaturization, multi-signal integration, and wireless data transmission may further expand its application prospects, paving the way for advanced intelligent healthcare platforms.

Key words: laser-induced graphene, polyimide, temperature sensor, health monitoring, sensing performance, electrical conductivity, flexible sensor

中图分类号:

TP 212

孙小芸, 岳程飞, 张如全. 基于激光诱导石墨烯的柔性温度传感器制备及其性能[J]. 纺织学报, 2026, 47(03): 129-138.

SUN Xiaoyun, YUE Chengfei, ZHANG Ruquan. Preparation and performance of flexible temperature sensor based on laser-induced graphene[J]. Journal of Textile Research, 2026, 47(03): 129-138.

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链接本文: http://www.fzxb.org.cn/CN/10.13475/j.fzxb.20250900501

http://www.fzxb.org.cn/CN/Y2026/V47/I03/129

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